Broadband Pillar-Type Antireflective Subwavelength Structures for Silicon and Alumina

A broadband antireflective subwavelength structure was developed suitable for large diameter silicon or alumina lenses used in the optical systems of superconducting cameras. In this study, a broadband antireflective subwavelength structure that can be easily fabricated with a dicing blade was designed. The model comprised both a pyramidal section (550 μm in depth) and a straight section (150 μm in depth) to simplify fabrication with a metal bonded V-shaped blade and a normal straight dicing-blade. The simulated transmittance between 97 and 334 GHz was >90%, which is comparable to that with a 700-μm-depth tapered structure. The structure was fabricated on a flat surface, and transmittance at cryogenic temperatures was measured using a Fourier transform spectrometer. The measured average transmittance between 186 and 346 GHz was approximately 95%, and the experimental result is in good agreement with the simulation results.