Spectroscopic ellipsometry characterization of sine-like surface relief Ni gratings

Spectroscopic ellipsometry was employed for determination of structural parameters of holographic Ni grating: its period and profile depth. Native oxide overlayer was also taken into account. Moreover slight deviation of sine-like profile was considered and analyzed. Obtained results were compared with conventional complementary methods as scanning electron microscopy, atomic force microscopy and optical microscopy. Advantages and disadvantages of all above mentioned approaches were presented.