Impact and Design Guideline of Monolithic 3-D IC at the 7-nm Technology Node

Monolithic 3-D (M3D) IC is one of the potential technologies to break through the challenges of continued circuit power and performance scaling. In this paper, for the first time, we demonstrate the power benefits of M3D and present design guideline in a 7-nm FinFET technology node. The predictive 7-nm process design kit (PDK) and the standard cell library using both high-performance (HP) and low-standby-power (LSTP) device technologies are developed based on NanGate 45-nm PDK using accurate dimensional, material, and electrical parameters from publications and a commercial-grade tool flow. We implement full-chip M3D designs utilizing industry-standard physical design tools, and gauge the impact of M3D technology on performance, power, and area metrics. We also provide the design guidelines as well as a new partitioning methodology to improve M3D design quality. This paper shows that M3D designs outperform 2-D counterparts by 16% and 16.5% on average in terms of isoperformance total power reduction with 7-nm HP and LSTP cell library, respectively. This demonstrates the power benefits of M3D technology in both HP and low-power future generation devices.