Semiconductor lasers with one- and two-dimensional air/semiconductor gratings embedded by wafer fusion technique

This paper describes the use of wafer fusion technique between submicrometer-order patterned wafers to realize novel optoelectronic devices. First, to demonstrate the feasibility of applying the technique to optoelectronic devices, we demonstrate a continuous wave oscillation of a one-dimensional distributed feedback laser with air/semiconductor gratings embedded by the wafer fusion technique. Next, we fabricate a device with two-dimensional triangular-lattice structure and obtain a very unique hexagonal symmetric surface-emitting pattern. From the calculated photonic band diagram of the device, the surface-emitting pattern is considered to reflect the photonic band nature of triangular-lattice structure. The room temperature lasing oscillation of the device with two-dimensional triangular-lattice structure is also achieved. These results indicate that the air/semiconductor gratings formed by wafer fusion technique can be applied to develop various optoelectronic devices, and the realization of novel devices is expected.