The computer simulation and calculation for the strain distribution of the twin-isles high temperature pressure sensor

In this paper, the strain distribution of the twin-isles structure of polysilicon pressure sensor has been simulated and calculated by computer through finite element method. The 3-D patterns have been plotted. According to the law of strain distribution of twin-isles structure, the design of polysilicon strain resistance is optimized. Moreover, the disadvantage that piezoresistive coefficients of polysilicon are lower than single-crystal silicon is remedied. The twin-isles structure polysilicon piezoresistance pressure sensors are fabricated. They have high sensitivity and high working temperature. The results of experiments agree with calculation.