System identification and control for ASU's molecular beam epitaxy (MBE) machines

This paper describes how experimentally derived data and standard system identification methods have been used to obtain useful continuous time models for molecular beam epitaxy machines residing at Arizona State University (ASU). Two linear time invariant dynamical models are presented which describe the the input-output map between heater power and substrate temperature. A control law based on the simpler model is proposed. Future directions are also discussed.