Design of ZnO/SiO/sub 2//Si monolithic integrated programmable SAW filter

In this paper the design of a ZnO/SiO/sub 2//Si monolithic integrated programmable SAW filter is suggested. The input SAW interdigital transducer (IDT) and tap delay lines (TDL) are fabricated on ZnO/SiO/sub 2/ structure. A NMOS-DMOS sampling, weighting, controlling and summing integrated circuit is designed compatibly in SiO/sub 2//Si structure. This IC can control the IDT and TDL by programmable weighting signal to realize the shift of the central frequency of bandpass of this SAW filter.