The development of deep sub micrometer semiconductor device simulation based on the CORBA platform

This paper has discussed the designs of general deep sub micrometer semiconductor device simulation software based on the proposed object model of drift diffusion. Because of the properties of object-oriented design, it is easy to add models and methods into the existent system. Thus, a network distributed calculation model based on the CORBA platform can be realized on the basis of this object model. Using CORBA technology, we can make full use of the existent network resources to solve the problems of the calculation scale and speed in device simulation by parallel calculation.