A wide voltage range charge pump in 0.13 μm CMOS for biasing of MEMS resonators

A wide voltage range charge pump is designed in 0.13 μm CMOS technology to provide biasing voltages for MEMS resonators. The pump provides an output range of 32.6 V, from -16.1 V up to 16.5 V, by using four different charge pump cells based on cross-coupled voltage doublers. Two cascaded negative charge pumps and two cascaded positive charge pumps with enhancements to breakdown and high voltage tolerance are implemented.