A small pixel CMD image sensor

A charge modulation device (CMD) imager with pixel dimensions of 7.3 mu m(H)*7.6 mu m(V) was designed, fabricated, and examined. These pixel dimensions are suitable for an HDTV imager with a 1-in image format. The optical aperture ratio is 34%. The effective number of pixels in the imager is 660 horizontal and 492 vertical. The saturation signal current is 17 mu A/pixel at an exposure of 1 lx-s with good linearity of photoconversion characteristics. The peak of its spectral response occurs at a wavelength of 575 nm. The blooming suppression ratio of the CMD was measured to be -122 dB. The sensor produces a high-quality image with no degradation in spatial resolution and no image lag. These features show that the CMD imager is eminently suitable for a further high-resolution imager sensor.<
>