Collaborative approaches to environmental health and safety programs at the Virginia Microelectronics Center

The Virginia Microelectronics Center (VMC) introduced microelectronic research and education to Virginia Commonwealth University (VCU) and posed a unique set of health and safety challenges. In order to address these issues, a collaborative safety approach was developed among the VCU School of Engineering (SOE) faculty and staff, VCU's Office of Environmental Health and Safety (OEHS), Facilities Management, and local industrial partners (Motorola Inc. and White Oak Semiconductor Inc.). Many of the issues that this group addressed are outlined in this paper-hazardous materials management, chemical waste disposal, environmental monitoring, and safety training. This collaborative approach to health and safety brought together an array of expertise that produced innovative solutions to complex hazards. These solutions provided for a safe and healthful education/research environment but not at the expense of efficiently functioning cleanrooms.