A new initiative in microelectronics processing at Georgia Tech

Georgia Tech has initiated a CMOS baseline process through its Microelectronics Research Center (MiRC) aiming at a new level of clean room discipline and process capability. The new initiative is also intended to establish a "platform" for research on a variety of new materials and device structures, It will support a whole range of advanced CMOS related research, such as multichannel chemical sensor array, MEMS, gate stack reengineering, and shallow junction CMOS. It will also support educational programs in processing and design of CMOS devices at Georgia Tech. This paper will detail the plan and the progress of the new CMOS initiative.