Error analysis and amelioration method of internal vapor analysis test for small hermetic devices

This paper is commissioned to find the mechanism which leads to badly consistency IVA test results and the defects in IVA test sequence for small devices (package volumes ≤ 0.03cc), thereby to improves the test method. Package materials and executing seal processes were studied to find the mechanism that leads to badly consistency IVA test result. And analysis of the test tolerance and the sensitive measure steps was presented. A way to solve problem of inlet pressure depression was to redesign the fixture tools for small hermetic devices. This redesign follows the principle to eliminate the vacuum cavity when applying a fixture too. Test result turns out stable and reliable in the later practical engineering after redesign, which proves that the amelioration of IVA test method is effective.