Design of signal conditioning circuit based on MEMS acceleration sensor

The MEMS acceleration sensors have been widely applied in many fields, especially in the detection of geological and geological imaging. In this paper, on the basis of MEMS sensors designed the sensor peripheral circuit and the signal conditioning circuit. The theoretical simulation and experimental test are adopted to carry out the shallow geological exploration project. Experimental results show that the design of the MEMS digital geophone of this topic has a high resolution and precision as well as characteristics of low noise, and meeting the requirements of the digital detector for shallow geological exploration.