Parts per million CH4 chemoresistor sensors based on multi wall carbon nanotubes/metal-oxide nanoparticles

This paper presents a novel atomic layer deposition (ALD) based ZnO functionalization of surface pretreated multiwalled carbon nanotubes (MWCNTs) for highly sensitive methane chemoresistive sensors. The temperature optimization of the ALD process leads to enhanced ZnO nanoparticle functionalization and improvement in their crystalline quality as shown by transmission electron microscopy. Here we propose a facile and effective top-down method for the high-yield fabrication of chemoresistor sensors making use of MWCNTs/ZnO composite. The behavior of MWCNTs/ZnO sensors in presence of methane concentrations down to 10 ppm level has been investigated. The sensor is currently being tested under a range of conditions that include potentially interfering gases and changes to relative humidity.