Development of cylinder hollow structure with flow sensor by film transfer technology

We previously proposed the smooth-surfaced flexible sensor for detecting wall shear stress, and developed the fabrication process to assemble the sensor onto the flexible flat surface. This time, we newly proposed a cylinder hollow structure with the flow sensor to easily attach and detach the flow sensor onto the guide wire in the commercialized basket forceps, and challenged to assemble the sensor element onto the curved cylinder hollow surface by applying the film transfer technology. The two-layer film structure was introduced to produce the cylinder hollow with the thermal flow sensor, and its fabrication process was developed. The macroscopic model of the cylinder hollow with the thermal flow sensor was fabricated. Two fundamental flow sensor characteristics of the thermal flow sensor were evaluated. The shorten response time of 17 ms was obtained because of the thinness of the parylene film substrate. The flow rate detection property was obeyed the King's law.