Dielectric charging in MEMS capacitive switches a persisting reliability issue, available models and assessment methods

The reliability issue of dielectric charging in MEMS capacitive switches is discussed taking into account the present knowledge derived from the numerous papers on this topic. The weakness of the available charge injection model is pointed, the dependence of the material stoichiometry with film thickness resulting in lateral charge redistribution is discussed, the available assessment techniques are presented and the discharge process through the dielectric film is analyzed.