A 2.4 GHz CMOS LC VCO using micromachined variable capacitors for frequency tuning

This paper demonstrates a CMOS voltage controlled oscillator operating at 2.4 GHz, which utilizes bonding wire inductors and micromachined electro-mechanically tunable capacitors for frequency tuning. The prototype device achieves a phase noise of -122 dBc/Hz at 1 MHz offset from the carrier and has a tuning range of 3.4 percent.