Silicon-Based Monolithic Planar Micro Thermoelectric Generator Using Bonding Technology

A technology of planar micro thermoelectric generators (μTEGs) with double thermal deflections is presented in this letter. We focus on the development of an original technic of bonding pillars etched on a first silicon wafer onto the fragile membranes of a second silicon wafer. The monolithic devices realized are able to convert waste heat into electrical power. The maximum output power for a live-membranes-based μ TEG is 12.3 μ W/cm
²
, for an input power of 2 W/cm
²
. This kind of μ TEG has a high thermal resistance. It is deduced to be 44.3 K/W, which allows a heat adaptation to any environment with a high thermal resistance.