Hysteresis compensation for piezoelectric laser scanner with open-loop control method

Piezoelectric actuators are widely deployed in many precise positioning applications. However, all piezoelectric systems feature hysteresis effect to limit their linearity. To solve this problem, feedforward compensation is the most common technique. Many models have been proposed and applied, but their expressions are complex and parameters are difficult to identify. In this paper, a simple model for a piezoelectric laser scanner is proposed. The principle of the mode is to obtain the data of smaller hysteresis loop from the bigger one by multiplying a scaling factor. Simulation results show that the error of the model is less than + 0.8%. Based on the model, a feedforward open-loop controller is detailed. Experimental results show the nonlinearity reduces from + 7% to + 1% after compensation.