Process flow for integration silicon grass with metallic nanostructures in surface micromachined systems

A process flow for integration metallic nanostructures in surface micromachining processes is presented. The nanostructures are generated by evaporation of metal on top of microstructured silicon grass (Si grass). The process flow is based on the lift-off of a thin amorphous silicon layer deposited using a CVD process. All steps feature a low temperature load beneath 120 deg C and high compatibility with many materials as only well-established chemicals are used. As a result metallic nanostructures usable for optical applications can be generated as part of multi-layered microsystems fabricated in surface micromachining.