Oxidation Drive-In to Improve Industrial Emitter Performance by POCl3 Diffusion

In this paper, we investigate the influence of different N
₂
/O
₂
ambient compositions during POCl
₃
diffusion on the emitter quality, characterized by secondary ion mass spectrometer and electrochemical capacitance-voltage measurements (J
_0E
) and internal quantum efficiency. It is presented that O
₂
concentration during the drive-in step strongly impacts both emitter electrical properties and cell performances, supported by the loss breakdown analysis. This process can be easily adapted to the industry, improving the emitter quality for screen-printed solar cells.