PLD-Fabricated Isotropic Pr–Fe–B Film Magnets Deposited on Glass Substrates

Pr-Fe-B thick-film magnets were deposited on glass substrates without a buffer layer using a pulsed laser deposition method to apply the films to micro-electro-mechanical systems. Large particles with the average diameter of approximately 50 μm were emitted from a target and enabled us to obtain the relatively high deposition rate of 30 μm/h. An approximately 100 μm-thick Pr-Fe-B film with the (BH)
_max
value of 70 kJ/m
³
could be obtained. After polishing a Pr-Fe-B thick film deposited on a glass substrate with groove, the magnetic properties of the film did not deteriorate.