Fabrication of ZnO thin film sensor for MIS flexible force feedback device

A flexible MIS(Minimally Invasive Surgery) force feedback sensor is a prospective technology for the extensive application of a Piezoelectric device. The purpose of this study was to know the crystallization of ZnO film for MIS force feedback sensor by sol-gel technology and spin coating. The center of operating frequency of this MIS force feedback sensor was measured by a vector network analyzer. The results showed a significant deviation of frequency resulted from the performance of AlN Doped ZnO. Characteristics of the piezoelectric MIS force feedback sensor are thin, portable and flexible. The improvement of fabricated parameters may enhance the effect of sensing of this MIS force feedback sensor.