A key more-than-moore technology: CMOS-MEMS resonant transducers

This paper presents the recent progress on CMOS-MEMS resonant transducers, including their applications, fabrication, performance, bottlenecks, and feasible solutions to address the existing issues. The MEMS/IC integration for sensors and actuators through the CMOS-MEMS technology will be emphasized. In addition, various transduction mechanisms employed in CMOS-MEMS will be introduced and compared with each other, showing a proper selection of actuation and sensing is key to achieving decent performance in a variety of application scenarios. Finally, a few implementations of signal processors and sensors via the CMOS-MEMS technology will be presented.