Design of microfabricated inductors

Possible configurations for microfabricated inductors are considered. Inductance can be set by adjusting permeability through control of anisotropy of a permalloy core or via a patterned quasi-distributed gap. A design methodology based on a simple model is proposed. A more accurate model and a numerical optimization are also developed. Design examples for 5- and 10-MHz buck converters and 2.5-MHz resonant converter applications are presented.