Observation of Coulomb blockade in structures created by the method of SECO (step edge cut off)

For observation of the Coulomb blockade, SECO-structures with self-aligned gates with island size of 170/spl times/170/spl times/12 nm on Ti/Si/sub 3/N/sub 4/ were fabricated. On these structures, single-electron current oscillations from gate voltage were observed at a temperature of 4.2 K. The magnitude of the Coulomb gap was 6 mV.