Design optimization of a capacitive transducer for displacement measurement

Capacitive transducers are used to measure displacements automatically and precisely. In general, performance of these devices are based on their capacitances. In this paper, inverse problem methodology (IPM) is applied with boundary elements for design optimization of comb-shaped capacitive transducers. Efficiency of IPM is successfully verified by comparing the optimum design using IPM to that obtained using a classical method.