Monolithic InP-biased tunable filter with 10-nm bandwidth for optical data interconnects in the 1550-nm band

We report the design and fabrication of micromechanically tunable filters with a 10-nm bandwidth for the 1550-nm wavelength range. The electrostatic actuation provides a tuning range of 30 nm and a low actuation power. The filters consist of a monolithic, vertical Fabry-Perot resonant cavity based on an epitaxial InGaAsP-InP Bragg reflector. An actuable InP micromechanical structure suspended over a 1/spl times/-thick air-gap provides for the tuning of the cavity. Our design aims primarily for a device that is simple, robust and that can be integrated with an InP-based photodetector or emitter in a low-cost component for optical data interconnects.