In-situ assembly for MEMS based pressure sensor

With the continuous development of MEMS, very small parts are being made, which propose very challenging task in the assembly process of those parts. The parts are highly coupled with very high accuracy requirements, requiring strict selection and not mutual changeable. These may result in the gap that is too small and jammed or resulting clearance is too large and will cause the loss of job performance. These coupled parts must be assembled in-situ and even in real time. Restricted by manipulator position accuracy, micro assembly can be achieved by visual and force feedback control. The rational allocation of microscopic vision system of micro assembly system, establishes an effective micro pressure sensor and control method, which is the problem that must be solved for micro assembly system. This assembly system can automatically, quickly and accurately implement assembly tasks. In view of the tiny parts based on MEMS, we established a complete set of micro assembly system for MEMS piezoresistive pressure sensor with silicon microstructure, and designed a whole structure of micro assembly, and in-situ calibration.