A frequency output ferroelectric phase PNZT capacitor-based temperature sensor

In this paper, a frequency output temperature sensor based on a 4% Niobium doped 20/80 Zr/Ti Lead Zirconate Titanate (PNZT) capacitor is proposed. The sensor capacitance vs temperature and capacitance vs voltage characteristics are experimentally measured below the Curie temperature of the ferroelectric capacitor. The capacitance of the 20/80 (Zr/Ti) composition PNZT capacitor changes by 29% for a temperature change from 10°C to 100°C, which translates to 0.32%/°C temperature sensitivity. The measured sensor characteristics show less than ~0.7°C deviation from the ideal linear response. A Wien bridge oscillator based temperature sensor is demonstrated based on the PNZT capacitors. Mathematical analysis for the effect of the op-amp finite unity-gain frequency on the sensor circuit oscillation frequency is provided. The experimentally realized frequency output temperature sensor shows -17.6% relative frequency change for a temperature change from 10°C to 100°C. The proposed capacitive temperature sensor can be used in low-power smart sensor nodes without the need for extensive calibration.