High speed mid-infrared detectors based on MEMS resonators and spectrally selective metamaterials

This work reports the development of uncooled spectrally selective mid-infrared (IR) detectors based on the seamless integration of metamaterial (MM) structures with microelec-tromechanical AlN resonators. The complete coverage of the resonator surface with MM results in high mid-IR absorption (>80%) at an optimized spectral wavelength of 9.6 μm with a Full Width at Half Maximum (FWHM) of 1.02 μm without compromising resonator acoustic performance. A novel detector readout has also been implemented to linearly convert incident IR power to a DC voltage and to demonstrate the potential for expanding our single element detector to a focal plane array imager. The measurements of the detectors have shown a high temperature coefficient of impedance (TCZ) of 9.6% a fast thermal response time of 400 μs, and a responsivity of 33 V/W.