Ultra-Low Switching Voltage Induced by Inserting SiO2 Layer in Indium–Tin–Oxide-Based Resistance Random Access Memory

A lower switching voltage of indium-tin-oxide (ITO)-based resistance random access memory (RRAM) with an inserted SiO
₂
thin film was presented. The amplitude of switching voltage of device was below 0.2 V whether measured by direct current or alternating current sweep operation. Notably, the observed reset voltage increased with temperature. To clarify the switching mechanism, conduction current fitting and switching voltage statistics were applied to explore the regular voltage variation dependent on temperature. In addition, a reaction model was proposed to explain the oxygen concentration gradient induced between the inserted SiO
₂
and ITO electrode on the ITO-based RRAM device.