A Rapid Vibration Reduction Method for Macro–Micro Composite Precision Positioning Stage

A macro-micro composite precision positioning stage is mainly used in microelectronics manufacturing to achieve high velocity, high precision, and large-stroke positioning. The positioning accuracy and working efficiency of the stage are influenced by the inertial vibration caused by motion with high acceleration. This paper proposes an active vibration reduction (AVR) method employing a piezoelectric device for a designed macro-micro motion stage. The design model of the stage is established and its dynamic models are explored. The feasibility of the piezoelectric device as a vibration damper for the designed positioning stage is demonstrated through theoretical analyses, including natural frequency analysis and inertial vibration energy analysis. Furthermore, an optimal design of the stage with the AVR mechanism is established and then verified experimentally. The performance of the AVR method is examined and characterized through investigation of the differences in inertial vibration energy with and without the AVR, and the performance of the proposed method in terms of the vibration amplitude and positioning time is measured at different accelerations, velocities, and strokes. The theoretical and experimental analyses indicate the effectiveness of the proposed vibration reduction method, and this method could be employed in several applications that require vibration reduction.