Autonomous calibration of MEMS disk resonating gyroscope for improved sensor performance

This work describes a new method for autonomous mode-matching and quadrature nulling of a Microelectromechanical system (MEMS) wineglass mode gyroscope, utilizing particle swarm optimization. Use of this derivative-free optimization scheme allows for multi-objective optimization of gyroscopic performance parameters. Modal frequency split and both mode shapes' quadrature and amplitude were optimized through this method. Optimal parameters for frequency split, quadratures, and principle axis amplitudes were found to be 0.71 Hz, 13.9 and 10.5 mV, and 284.6 and 299.6 mV, respectively. Autonomous calibration greatly increased the scale factor of the sensor and enhanced the noise performance to levels typically achieved by diligent hand tuning.