Simulation and analytical study of MEMS based piezoresistive pressure sensor

In this paper, a parametric analytical and simulation solution for MEMS based pressure sensor is proposed. The principle of the paper is to design, obtain the results with the simulation using MATLAB programming for a square/rectangular diaphragm deflection. In order to achieve better sensor performance, a parametric analysis is performed to evaluate the system output sensitivity of the pressure sensor. The design parameters of the pressure sensor include the variation of the dimension of the diaphragm and the position of piezoresistor. The findings depict that proper selection of the diaphragm geometry and the piezoresistor position can enhance the sensor sensitivity. The maximum deflection of 50 μm was found for a stress factor of 7000 Mpa. With a particular square polysilicon diaphragm, the maximum deflection of 50 μm was found for an applied pressure of 100Mpa.