A Bistable Comb-Drive Electrostatic Actuator Biased by the Built-In Potential of Potassium Ion Electret

A new bistable micro-electro-mechanical systems actuator functioned by the potassium ion electret technique is presented. We utilize a three-terminal comb-drive actuator with a built-in electret potential. We first describe the operation principle of the bistable device that is driven by a pulse and/or step-function voltage. We next explain the fabrication results and the procedure of the electret polarization. Device operation is demonstrated to determine the switching characteristics from one stable state to another with a 12 V pulse voltage of 300 μs duration. We also establish bistable switching operation with a step voltage of 5 V or less, which is manageable by a battery for portable equipment. Discrepancy of switching characteristics between the theory and the experiments is discussed from a point of view on the fringe electrical fields between the comb electrodes.