Design of electromagnetic induction type MEMS motor with multilayer ceramic three-dimensional coil

This paper proposes an electromagnetic induction type MEMS (Micro Electro Mechanical Systems) motor. The developed MEMS motor is combined the MEMS process and the multilayer ceramic technology. The MEMS process forms the silicon miniature components for a structural part. The multilayer ceramic technology fabricates a miniature ceramic magnetic circuit. This technology is possible to realize a miniature three-dimensional coil with a magnetic core. The fabricated MEMS motor has diameter of 4.22 mm and height of 6.04 mm, respectively. The dimension error of the silicon components is less than ±5 micro meter. The fabricated miniature three-dimensional coil has 50 turns, and dimensions of the long side, short side and height are 3.07 mm, 1.85 mm and 2.5 mm, respectively. The combined MEMS motor demonstrates the rotational motion at an input voltage of 0.25 V with a frequency of 18 Hz. The rotational speed is 1080 rpm. By these results, the miniature electromagnetic induction type MEMS motor is achieved. In the future work, the MEMS motor that has the bearing structure and the deflection yoke will be developed to achieve the stable motion and the miniature body.