Tunable microcavity based on InP-air Bragg mirrors

A tunable Fabry-Perot filter based on InP-air Bragg mirrors has been studied. The filter experimental performances are a resonance line width of 0.6 nm and a tuning range of 62 nm for 14 V. The full-width at half-maximum is kept below 1 nm over a 40-nm tuning range. The relation between the bending of the suspended layers during the actuation and the optical properties of the filter are analyzed.