Design and implementation of 3D "Disk-shaped" MEMS vector hydrophone for acoustic orientation

In order to obtain the explicit underwater orientation, high-sensitivity 3D "Disk-structure" MEMS Vector Hydrophone (3DDVH) is proposed, which realizes tri-axial acoustic pressure sensing via appropriate structure design and piezoresistor distribution. Compared to previously reported 3D MEMS vector hydrophone, 3DDVH is advanced in tri-axial match so that it's promising in accurate acoustic orientation.