Q-factor optimization in disk resonator gyroscopes via geometric parameterization

We present an assortment of geometrically parameterized disk resonator gyroscopes (DRGs) individually designed for resonant frequency (f) and quality factor (Q). This work demonstrates accurate FEM-based predictions of Q for fabricated devices, and geometric optimizations that significantly improve this key performance metric for the DRG. Measurements on suites of fabricated devices confirm that losses are dominated by thermoelastic dissipation (TED). Qted is shown to account for 64-80% of the total energy dissipation. The temperature dependence of Q is also used to confirm and quantify the presence of pressure damping in the fabricated devices. At frequencies near 300 kHz, we show that Q can be increased by a factor of 2.6 and demonstrate feasibility of geometric/topological optimization of the fabricated devices with the aid of finite element software.