Oxidation of III-V semiconductors for novel optoelectronic applications

Summary form only given. We discuss the use of oxides in semiconductor optical waveguides and the challenges associated with design, growth and fabrication of such waveguides. We show a cross sectional scanning electron microscope view of a partially oxidized waveguide, and we show modal losses of various width waveguides for fully oxidized, partially oxidized and unoxidized cases. Applications to PIC technology, nonlinear wave mixing in oxide/semiconductor waveguides and edge emitting lasers will be discussed.