Rapid 3D micro-printing of optical whispering-gallery mode resonators

In this paper, we present a novel method for rapidly fabricating polymeric optical whispering-gallery mode (WGM) resonators. A 3D micro-printing technology based on high-power UV light source and high-speed optical spatial modulator (SLM) is developed, and the fabrication and testing of suspended-toroid WGM resonator array are demonstrated in the experiments. The experimental results reveal that the demonstrated method is very flexible and time-saving to quickly fabricate complex WGM resonators.