Underwater observation of vibration behavior of the miniature circular piezoelectric micromachined ultrasonic transducers

This paper presents the vibration behavior of the miniature circular piezoelectric micromachined ultrasonic transducers (pMUTs) under water for the first time As the results of the FSI analysis, the vibration modes and resonant frequencies were successfully observed and compared to the scanning LDV measurements. According to these result, some vibration mode and resonant frequencies were appeared in frequency range from 0.1 MHz to 10 MHz which were good agreement between FSI analysis and the LDV measurements. This result will contribute to design and analyze the pMUTs for the medical endoscopic applications.