Nanorobotic RF probe station for calibrated on-wafer measurements

This work describes a new generation of instrumentation that aims to address the challenge of on-wafer measurement of nanodevices in the microwave regime. The system proposed is built up with a vector network analyzer, a scanning electron microscope and miniaturized ground-signal-ground probes fabricated using silicon-on-insulator technology with contact sizes of 2 µm2. Dedicated calibration standards are developed and the proof of concept of the operability of this novel system is demonstrated by first calibrated on-wafer microwave measurements up to 4 GHz.