Intelligent line monitor: maximum productivity through an integrated and automated line monitoring strategy

This paper describes an intelligent line monitor system and highlights the features which make it superior to conventional line monitor systems. By citing examples from an IBM 0.25 /spl mu/m technology fabricator, we show that an integrated and automated line monitoring strategy reduces time-to-results, provides a low cost-of-ownership, and delivers a short time to return-on-investment. The natural expansion and growth possibilities of such a system are also explored.