Fabrication Of InP Sub-micron Pillars For Two-dimensional Photonic Crystals By Reactive Ion Etching

In this paper, we report preliminary results on fabrication of a periodic array of InP sub-micron pillars of circular cross section, whose intersections with a perpendicular plane form a triangular lattice, for two-dimensional (2D) photonic crystals in the optical wavelength region by reactive ion etching (RIE) using inductively coupled plasma (ICP) and electron cyclotron resonance (ECR) plasma. Their reflective properties have been characterized by Fourier transformed infrared reflection absorption spectrometry (FTIRRAS).