Silicon-to-silicon microswitch with wide operation temperature range

Using an ultra-clean vacuum sealing process, an encapsulated Si-to-Si contact micro switch is fabricated and characterized. This three-terminal micro switch relies on a curved beam (source) that actuates toward the contact terminal (drain) by charging the control terminal (gate). We report the temperature stability of this switch from -60 °C to 300 °C, which yields a resistance drift of -196 Ω/K. Meanwhile, through continuous on-off cycles, the operating lifetime in high temperature environment is investigated. Microswitches of more than 10
⁶
cycles lifetime at 400 °C are successfully demonstrated. The study of such Si-to-Si contact-based micro switches provides a crucial guideline to the field of mechanical and electrical failure mechanisms for harsh environment applications.