Piezoelectric KNbO/sub 3/ films for SAW device applications

KNbO/sub 3/ films have been deposited on STO (SrTiO/sub 3/) substrates using MOCVD techniques. The gas-grown films are sufficiently piezoelectric to fabricate SAW devices. The experimental results show the electromechanical coupling coefficients (K/sup 2/) of 0.021 at the center frequency of 960 MHz and h//spl lambda/=0.24 (/spl lambda/:SAW wavelength, h: film thickness of KNbO/sub 3/). These values have fairly good agreements with theoretical ones calculated by using the piezoelectric constants of single crystals.