A fiber connectorized MEMS variable optical attenuator

A voltage-controlled moving-mirror microelectro-mechanical systems variable optical attenuator is described that has less than 1-dB fiber-to-fiber insertion loss at 1550-nm wavelength and greater than 50-dB dynamic range. The device was configured with a simple feedback circuit to operate as an optical power regulator capable of stabilizing the output power to within 0.26 dB for a 12-dB input power excursion.